METHOD OF PRODUCING CERAMIC MULTILAYER SUBSTRATE - MATSUSHITA ELECTRIC IND CO LTD

Title:

METHOD OF PRODUCING CERAMIC MULTILAYER SUBSTRATE

Document Type and Number:

WIPO Patent Application WO/1999/056510

Kind Code:

A1

Abstract:

A method of producing a ceramic multilayer substrate, comprising providing both sides of a stack of unfired green sheets with shrinkage-suppressing sheets, firing the stack to produce a multilayer body, compressed air and water, or a ceramic powder, or a mixture of water and a ceramic powder is sprayed against the multilayer body to remove the shrinkage-suppressing sheets from both sides without damaging the multilayer substrate.

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Inventors:

SEGAWA SHIGETOSHI (JP)
OCHI HIROSHI (JP)
BABA YASUYUKI (JP)
SHIRAISHI OSAMU (JP)
KONISHI MASAO (JP)

Application Number:

PCT/JP1999/002079

Publication Date:

November 04, 1999

Filing Date:

April 19, 1999

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC IND CO LTD (JP)
SEGAWA SHIGETOSHI (JP)
OCHI HIROSHI (JP)
BABA YASUYUKI (JP)
SHIRAISHI OSAMU (JP)
KONISHI MASAO (JP)

International Classes:

H01L21/48; H05K3/00; H05K1/03; (IPC1-7): H05K3/46

Foreign References:

JPH05102666A	1993-04-23
JPH0417392A	1992-01-22
JPH0864968A	1996-03-08

Other References: