METHOD FOR PRODUCING CLOSED CELL CELLULAR MATERIAL FOR USE IN POLISHING, CELLULAR SHEET FOR POLISHING, LAMINATE FOR POLISHING AND POLISHING METHOD, METHOD FOR PRODUCING LAMINATE FOR POLISHING, AND GROOVED POLISHING PAD

WIPO Patent Application WO/2004/054779

A1

A method for producing a closed cell cellular material having an average cell diameter of 0.1 to 100 μm, which comprises a step (A) of incorporating a blowing agent into a molten resin under a pressure of more than 10 MPa of an atmosphere in an extruder, and a subsequent step (B) of exposing the resultant molten resin to a pressure lower than the pressure at the time of incorporation of the blowing agent; a cellular sheet and a laminate for polishing using a closed cell cellular material produced by the method; a polishing method using the laminate for polishing; a method for producing the laminate for polishing; and a grooved polishing pad.

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MASAKI YOSHINORI (JP)
FURUKAWA TSUYOSHI (JP)
YAGATA KAZUHIKO (JP)

PCT/JP2003/014964

July 01, 2004

November 25, 2003

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SUMITOMO BAKELITE CO (JP)
MASAKI YOSHINORI (JP)
FURUKAWA TSUYOSHI (JP)
YAGATA KAZUHIKO (JP)

B24B37/26; B24D11/00; B24D13/14; B29C44/34; B29C48/38; (IPC1-7): B29C47/00; B24B37/00; H01L21/304

WO2002046283A1	2002-06-13
WO1994004599A1	1994-03-03

JP2002201301A	2002-07-19
JP2001261874A	2001-09-26
JP2002264006A	2002-09-18
JP2001232554A	2001-08-28
JP2003128910A	2003-05-08
JP2002307293A	2002-10-23
US6336855B1	2002-01-08

Kitamura, Shuichiro (Kita-ku Osaka-shi, Osaka, JP)

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