Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
METHOD FOR PRODUCING COATING COMPOSITION AND METHOD FOR PRODUCING PHOTORESIST LAMINATE
Document Type and Number:
WIPO Patent Application WO/2018/012283
Kind Code:
A1
Abstract:
Provided is a coating composition which can increase film thickness without increasing the concentration of a film constituent material in a coating liquid and without using an additive such as a thickener. The coating composition is obtained by filtering a solution to be processed which contains a solvent and a fluorine-containing polymer having a unit represented by -[CX1X2-CY1(Rf1-COOM1)]-, by using a filter medium having a fluorine atom content of 70 mass% or less. X1 and X2 represent H, F, or Cl; Y1 represents H, F, Cl, a methyl group, or a trifluoromethyl group; Rf1 represents a perfluoroalkylene group optionally containing an ethereal oxygen atom between carbon atoms, or an oxyperfluoroalkylene group optionally containing an ethereal oxygen atom between carbon atoms; and -COOM1 represents -COOH or -COOZ1 (Z1 represents an ammonium ion, a hydrogen atom of which is optionally substituted).

Inventors:
YAMASAKI Ryujiro (Limited 5-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 05, 〒1008405, JP)
SAKANE Yoshihiko (Limited 5-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 05, 〒1008405, JP)
Application Number:
JP2017/023643
Publication Date:
January 18, 2018
Filing Date:
June 27, 2017
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
ASAHI GLASS COMPANY, LIMITED (5-1 Marunouchi 1-chome, Chiyoda-ku Tokyo, 05, 〒1008405, JP)
International Classes:
C09D129/10; B01D71/04; B01D71/26; B01D71/34; B01D71/56; C09D133/02; G03F7/11; G03F7/16; G03F7/26
Attorney, Agent or Firm:
SENMYO Kenji et al. (3rd Floor, PMO Kanda-Tsukasamachi 2-8-1, Kanda-Tsukasamachi, Chiyoda-k, Tokyo 48, 〒1010048, JP)
Download PDF: