METHOD FOR PRODUCING A COMPONENT COMPRISING A CONDUCTOR STRUCTURE THAT IS SUITABLE FOR USE AT HIGH FREQUENCIES AND CORRESPONDING COMPONENT

Title:

METHOD FOR PRODUCING A COMPONENT COMPRISING A CONDUCTOR STRUCTURE THAT IS SUITABLE FOR USE AT HIGH FREQUENCIES AND CORRESPONDING COMPONENT

Document Type and Number:

WIPO Patent Application WO2003100859

Kind Code:

A3

Abstract:

The invention relates to a method for producing a substrate (1) comprising a conductor assembly (4, 41, 42) that is suitable for use at high frequencies, said substrate having improved high-frequency characteristics. The method comprises the following steps: deposition of a structured glass layer (9, 91, 92, 93, 13) comprising at least one opening (8) above a contact region (71 - 74) by vapour deposition on the substrate (1); and application of at least one conductor structure (100, 111, 112, 113) to the glass layer (9, 91 - 93), which is in electric contact with the contact region (71 - 74).

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Inventors:

LEIB JUERGEN (DE)
MUND DIETRICH (DE)

Application Number:

PCT/EP2003/005415

Publication Date:

January 20, 2005

Filing Date:

May 23, 2003

Export Citation:

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Assignee:

SCHOTT AG (DE)
LEIB JUERGEN (DE)
MUND DIETRICH (DE)

International Classes:

H05K3/46; B81C1/00; C03B19/00; C03C4/12; C03C14/00; C03C15/00; C03C17/02; C03C17/34; C23C14/10; H01L21/316; H01L21/50; H01L21/56; H01L21/768; H01L23/10; H01L23/29; H01L23/31; H01L23/48; H01L23/498; H01L23/532; H01L23/66; H01L51/52; H01P11/00; H05K3/28; (IPC1-7): H01L23/66

Foreign References:

US5929510A	1999-07-27
US4564997A	1986-01-21
DE10042653A1	2002-03-28

Other References: