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Title:
METHOD FOR PRODUCING COMPOSITE SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2023/135844
Kind Code:
A1
Abstract:
The invention provides a composite substrate having exceptional durability. This method for producing a composite substrate according to an embodiment of the present invention comprises: forming a first layer on a lower surface side of a piezoelectric substrate having an upper surface and the lower surface on opposite sides from each other, and having an electrode provided on the lower surface; planarizing the first layer so that the waviness of the surface is greater than 2 nm but no greater than 70 nm; and joining a support substrate to the first layer side of the piezoelectric substrate having the first layer formed thereon.

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Inventors:
YAMADERA TAKAHIRO (JP)
IIDA TSUYOSHI (JP)
Application Number:
PCT/JP2022/030156
Publication Date:
July 20, 2023
Filing Date:
August 05, 2022
Export Citation:
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Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H03H3/08; H03H9/25
Foreign References:
JP2003165795A2003-06-10
JP2009524955A2009-07-02
JP2015050653A2015-03-16
JP2020057952A2020-04-09
Attorney, Agent or Firm:
MOMII Takafumi (JP)
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