METHOD FOR PRODUCING DIALKYLAMINOSILANE

Title:

METHOD FOR PRODUCING DIALKYLAMINOSILANE

Document Type and Number:

WIPO Patent Application WO/2016/152226

Kind Code:

A1

Abstract:

In a method for synthesizing a dialkylaminosilane by the reaction of chlorosilane with an dialkylamine which is one of the methods for producing the dialkylaminosilane, a dialkylamine hydrochloride is produced as a byproduct in a large quantity besides the desired dialkylaminosilane. Thus, the purpose of the present invention is to prevent the decrease in volumetric efficiency, which may be caused by a large quantity of a solvent, during the production of the desired dialkylaminosilane, and to produce the dialkylaminosilane in a large quantity at low cost. A dialkylaminosilane having high volumetric efficiency and a reduced halogen content can be produced using, as a solvent to be used in the reaction of a dialkylamine with chlorosilane, both an aprotic polar solvent that has high solubility for a dialkylamine hydrochloride and a metal chloride which are produced as byproducts during the reaction and a linear or branched hydrocarbon that has high solubility for the dialkylaminosilane and can hardly dissolve a halogen compound therein.

Inventors:

TANAKA TORU (JP)

Application Number:

PCT/JP2016/051787

Publication Date:

September 29, 2016

Filing Date:

January 22, 2016

Export Citation:

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Assignee:

JNC CORP (JP)

International Classes:

C07F7/10

Domestic Patent References:

WO2015146103A1

2015-10-01

Foreign References:

JP2012025733A	2012-02-09
JP2012136472A	2012-07-19
JPS59184157A	1984-10-19
JP2010225663A	2010-10-07
JP2004250431A	2004-09-09
JP2015208718A	2015-11-24

Other References: