METHOD FOR PRODUCING FINE SILICON POWDER, AND METHOD FOR PRODUCING FINE SILICON NITRIDE POWDER

WIPO Patent Application WO/2016/171018

A1

[Problem] To provide a method for producing fine silicon powder which allows for collection of high-purity flaky fine silicon powder from silicon cutting scraps generated during slicing of a silicon ingot, without using a mechanical pulverization means, such as a ball mill, jet mill, or the like. Further, to provide a method for producing fine silicon nitride powder using flaky fine silicon powder as a starting material. [Solution] A silicon ingot 3 fixed to a fixing plate 4 containing aluminum hydroxide is cut using a fixed abrasive grain wire saw 2, and a slurry containing a silicon cutting powder, impurities, and coolant liquid is recovered. The recovered slurry is subjected to solid-liquid separation to extract a cake 18 containing the silicon cutting powder and impurities. The cake 18 is washed for 20-60 minutes through immersion and stirring in an aqueous sulfuric acid solution containing 1-40 wt% of sulfuric acid and heated to 50-90°C.

IKEUCHI MASAHIKO (JP)
GUESHI TATSURO (JP)
YAMAMOTO TOYOHIRO (JP)
KAWATA MAKOTO (JP)
TAKAISHI TAIGO (JP)
INADA HIROFUMI (JP)
ARAKAWA YUYA (JP)
KADONO JUNICHIRO (JP)
MINAMI HIDEAKI (JP)

PCT/JP2016/061653

October 27, 2016

April 11, 2016

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TKX CORP (JP)
KYOTO MUNICIPAL INST OF IND TECH AND CULTURE (JP)

C01B33/021; B08B3/08; B08B3/10; B24B27/06; B24B57/02; B28D5/04; C01B21/068

JP2012111672A	2012-06-14
JP2012020364A	2012-02-02
JP2007180527A	2007-07-12
JP2014133288A	2014-07-24
JP2000263452A	2000-09-26
JP2013187109A	2013-09-19
JPH04114908A	1992-04-15
JP2012056841A	2012-03-22
JP2007136909A	2007-06-07

KUSUMOTO, Takayoshi et al. (JP)
Takayoshi Kusumoto (JP)

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