METHOD FOR PRODUCING GLASS SUBSTRATE

WIPO Patent Application WO/2012/090655

A1

Provided is a method for producing a glass substrate comprising a polishing step which repeatedly uses a polished surface (24) of a polishing pad (20A) in which a plurality of openings (27) are formed on the polished surface (24) to perform a polishing process to each of a plurality of glass substrates, and which performs a dressing process to the polished surface (24) every time the polished surface (24) has been used for a predetermined number of times, wherein at the start of use of the polished surface (24), a first average area of the plurality of openings (27) is defined based on the area of each of the plurality of openings (27), and every time a dressing process is performed on the polished surface (24), a second average area of the plurality of openings (27) is defined based on the area of each of the plurality of openings (27), thereby an average value is defined based on the first average area and the second average area after the polishing process. The first average area and the second average area after the polishing process are within the range of 64% to 144% with respect to the above average value.

KAWAI HIDEKI (JP)
KATO TATSUHISA (JP)
ENDO TAKESHI (JP)
KOMATSU TAKAFUMI (JP)

PCT/JP2011/078156

July 05, 2012

December 06, 2011

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KONICA MINOLTA OPTO INC (JP)
KAWAI HIDEKI (JP)
KATO TATSUHISA (JP)
ENDO TAKESHI (JP)
KOMATSU TAKAFUMI (JP)

C03C19/00; B24B7/24; B24B37/26; G11B5/84

WO2009096294A1

2009-08-06

JP2005149668A	2005-06-09
JP2002083790A	2002-03-22
JPH10329007A	1998-12-15
JP2011218517A	2011-11-04

Fukami Patent Office, p. c. (JP)
Patent business corporation Fukami patent firm (JP)

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