METHOD FOR PRODUCING AN INITIAL POLYCRYSTALLINE SILICON IN THE FORM OF PLATES HAVING A LARGE SURFACE AND CHAMBER FOR THE PRECIPITATION OF SILICON

Title:

METHOD FOR PRODUCING AN INITIAL POLYCRYSTALLINE SILICON IN THE FORM OF PLATES HAVING A LARGE SURFACE AND CHAMBER FOR THE PRECIPITATION OF SILICON

Document Type and Number:

WIPO Patent Application WO/2001/032966

Kind Code:

A1

Abstract:

The method includes disposing a flat substrate in the chamber, supplying a flow of steam or steam-gas mixture along the flat surface of the substrate, heating the flat substrate by mean of the passing flow, precipitating the silicon from steam or steam-gas mixture on the flat surface, drawing the substrate out of the chamber and subsequent treatment. Materials with a specific strength range from 1.10 ?-3¿ Om cm to 50 Om cm are used as a flat substrate. The subsequent treatment consists of cutting the precipitated silicon off the flat substrate. The chamber consists of a body, holders for the flat substrates placed within the body in a way making it possible to place the flat substrates in horizontal rows, a nozzle supplying steam or a steam-gas mixture into the space between the rows and a nipple for the evacuation of steam or steam-gas mixture. Electrical supply lines are connected to the holders. The nozzles supplying steam or a steam-gas mixture are placed on the side of a wall of the body facing the longitudinal side of the flat substrate. The number of nozzles should not be less than two for each space between the horizontal rows.

Inventors:

DOBROVENSKY VLADIMIR VENIAMINO (RU)
KANATAEV JURY ALEXEEVICH (RU)
JULIN MIKHAIL KONSTANTINOVICH (RU)

Application Number:

PCT/RU2000/000423

Publication Date:

May 10, 2001

Filing Date:

October 26, 2000

Export Citation:

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Assignee:

ZAKRYTOE AKTSIONERNOE OBSCHEST (RU)
DOBROVENSKY VLADIMIR VENIAMINO (RU)
KANATAEV JURY ALEXEEVICH (RU)
JULIN MIKHAIL KONSTANTINOVICH (RU)

International Classes:

C30B29/06; C23C16/01; C23C16/24; C23C16/455; C23C16/458; C30B25/00; C30B25/14; C30B25/18; (IPC1-7): C30B29/06; C23C16/453; C30B25/00; C30B25/14; C30B25/18

Foreign References:

DE2541284A1	1977-03-24
GB1560982A	1980-02-13
JPS60253213A	1985-12-13
RU2010043C1	1994-03-30

Attorney, Agent or Firm:

Patent, Law Firm 'JUS' (PPF "JUS" Moscow, 9, RU)

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