Title:
METHOD FOR PRODUCING LAMINATE, AND LAMINATE
Document Type and Number:
WIPO Patent Application WO/2015/029577
Kind Code:
A1
Abstract:
A method for producing a laminate (21) which is provided with a substrate (11), a light-transmitting support plate (12) that supports the substrate (11), and a first separation layer (15) that is arranged between the substrate (11) and the support plate (12) and is altered in properties by means of absorption of light that is irradiated thereon through the support plate (12). The first separation layer (15) is formed by plasma processing using a reaction gas that contains a fluorine compound and an organic compound having an unsaturated bond.
Inventors:
MATSUSHITA ATSUSHI (JP)
MITAKE TATSUHIRO (JP)
MITAKE TATSUHIRO (JP)
Application Number:
PCT/JP2014/067181
Publication Date:
March 05, 2015
Filing Date:
June 27, 2014
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD (JP)
International Classes:
H01L21/02; H01L21/304; H01L27/12
Domestic Patent References:
| WO2012176607A1 | 2012-12-27 |
Foreign References:
| JP2013162091A | 2013-08-19 | |||
| JP2012109519A | 2012-06-07 |
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
Patent business corporation HARAKENZO WORLD PATENT & TRADEMARK (JP)
Patent business corporation HARAKENZO WORLD PATENT & TRADEMARK (JP)
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