Title:
METHOD FOR PRODUCING MAGNETORESISTIVE EFFECT ELEMENT, MAGNETIC SENSOR, ROTATION-ANGLE DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/007767
Kind Code:
A1
Abstract:
Disclosed is a method which can regulate the orientation and the directionality of the magnetization of a fixed ferromagnetic layer while reducing the number of steps to form a GMR layer. The magnetic orientation of the fixed ferromagnetic layer is regulated in a plurality of directions by means of forming a plurality of patterns that have directionality. Furthermore, when a magnetoresistive effect layer is formed, a magnetic field is applied at an angle set between the angles formed by the aforementioned plurality of patterns.
Inventors:
MEGURO KENICHI (JP)
HOSHIYA HIROYUKI (JP)
KATOU KEIZOU (JP)
ABE YASUNORI (JP)
HOSHIYA HIROYUKI (JP)
KATOU KEIZOU (JP)
ABE YASUNORI (JP)
Application Number:
PCT/JP2010/061806
Publication Date:
January 20, 2011
Filing Date:
July 13, 2010
Export Citation:
Assignee:
HITACHI METALS LTD (JP)
MEGURO KENICHI (JP)
HOSHIYA HIROYUKI (JP)
KATOU KEIZOU (JP)
ABE YASUNORI (JP)
MEGURO KENICHI (JP)
HOSHIYA HIROYUKI (JP)
KATOU KEIZOU (JP)
ABE YASUNORI (JP)
International Classes:
G01R33/09; G01D5/245; H01L43/08; H01L43/12
Foreign References:
| JP2009085953A | 2009-04-23 | |||
| JP2008306112A | 2008-12-18 | |||
| JP2006172686A | 2006-06-29 | |||
| JP2007317734A | 2007-12-06 | |||
| JP2006308573A | 2006-11-09 | |||
| JP2003502876A | 2003-01-21 |
Attorney, Agent or Firm:
HIRAKI YUSUKE (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
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