Title:
METHOD OF PRODUCING MICROSTRUCTURE ELEMENT, MICROSTRUCTURE ELEMEMT PRODUCED BY THE METHOD, SPACE LIGHT MODULATING DEVICE, AND PROJECTOR
Document Type and Number:
WIPO Patent Application WO/2005/084883
Kind Code:
A1
Abstract:
A method of producing a microstructure element includes a first flat section forming step of forming an upper flat surface (301), or a first flat section, on a substrate (500) by a flat bite as a cutting section, a second flat section forming step for forming lower flat surfaces (302), or second flat sections, by cutting by a predetermined depth h the upper flat surface (301), or the first flat section, and a bent surface forming step for forming sloped surfaces (303) by a flat bite (401) as a cutting section, the sloped surface (303) each being a bent surface having a predetermined angle Ѳa relative to a lower flat surface (302), or a second flat section.
Inventors:
KAMIJIMA SHUNJI
Application Number:
PCT/JP2005/004279
Publication Date:
September 15, 2005
Filing Date:
March 04, 2005
Export Citation:
Assignee:
SEIKO EPSON CORP (JP)
International Classes:
B23Q15/04; G02B5/02; G02B5/18; G02B5/04; G02B27/28; G02F1/1333; (IPC1-7): B23Q15/04; G02B5/02; G02B5/04
Foreign References:
| JPH03249602A | 1991-11-07 | |||
| JPH04191822A | 1992-07-10 | |||
| JP2001296649A | 2001-10-26 | |||
| JP2001255660A | 2001-09-21 |
Attorney, Agent or Firm:
Kamiyanagi, Masataka c/o Intellectual, Property Division (Seiko Epson Corporation 3-5, Owa 3-Chom, Suwa-Shi Nagano 02, JP)
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