METHOD FOR PRODUCING A MICROSYSTEM HAVING PIXELS

Title:

METHOD FOR PRODUCING A MICROSYSTEM HAVING PIXELS

Document Type and Number:

WIPO Patent Application WO/2015/014754

Kind Code:

A3

Abstract:

The invention relates to a method for producing a microsystem having pixels, comprising the following steps: providing a silicon wafer; producing thermal silicon oxide layers (5,6) on the surface of the silicon wafer; producing a platinum layer directly on the oxide (6); cooling the intermediate product; structuring the platinum layer in a pixel-like manner in order to form base electrodes (8, 12) of the pixels (7, 8); removing material on the side of the silicon wafer facing away from the oxide layer (5), such that a frame (3) remains and a membrane (4) formed by the oxide layers (5,6) is tensioned by the frame (3); finishing the microsystem (1).

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Inventors:

GIEBELER CARSTEN (GB)
CONWAY NEIL (GB)

Application Number:

PCT/EP2014/066084

Publication Date:

April 02, 2015

Filing Date:

July 25, 2014

Export Citation:

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Assignee:

PYREOS LTD (GB)

International Classes:

G01J5/34

Foreign References:

US20130023063A1	2013-01-24
US20120161002A1	2012-06-28
DE19525071A1	1997-01-16
DE10103529A1	2002-08-22

Attorney, Agent or Firm:

FISCHER, Ernst (München, DE)

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