Title:
METHOD FOR PRODUCING MODULES FOR MICROELECTRONIC COMPONENTS BY MEANS OF A PHOTOPOLYMERIZATION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/079110
Kind Code:
A3
Abstract:
The invention relates to a method for producing modules for electronic and/or optical and/or fluidic applications, proceeding from at least one wafer (1), on the surface of which microelectronic components (2) are provided in a regular and rectangular arrangement, wherein electrical contacts (4) are arranged in the edge region of the respective component, optical connections are also arranged on the surface of the respective component, wherein, by means of a photopolymerization method (RMPD mask method), dielectric packing structures (17), which are fixedly connected to the wafer (1), are generated in a layered manner around the respective component and/or above the components for all of these components in parallel and simultaneously, wherein in this case the electrical and/or optical contacts for each component are likewise produced, after which, at last, the modules thus produced are singulated after completion of all the connections by cutting the wafer in the region (16) between the individual modules.
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Inventors:
GÖTZEN REINER (DE)
Application Number:
PCT/EP2019/078141
Publication Date:
August 13, 2020
Filing Date:
October 17, 2019
Export Citation:
Assignee:
GÖTZEN REINER (DE)
International Classes:
H01L21/56; B01L3/00; B29C65/16; F21V8/00; H01L21/60; H01L23/31; H01L23/48; H01L23/522; H01L23/66; H01L31/0203; H01Q1/22
Foreign References:
| JP2001176898A | 2001-06-29 |
Other References:
DIPL REINER ING ET AL: "Generative Serienproduktion von Mikrokomponenten Technologieführer aus dem Mittelstand", RTEJOURNAL AUSGABE, 2004, XP055671092, Retrieved from the Internet [retrieved on 20200224]
BERTSCH A ET AL: "Microstereolithography: concepts and applications", EMERGING TECHNOLOGIES AND FACTORY AUTOMATION, 2001. PROCEEDINGS. 2001 8TH IEEE INTERNATIONAL CONFERENCE ON OCT. 15-18, 2001, PISCATAWAY, NJ, USA,IEEE, 15 October 2001 (2001-10-15), pages 289 - 298vol.2, XP032155782, ISBN: 978-0-7803-7241-2, DOI: 10.1109/ETFA.2001.997697
BERTSCH A ET AL: "Microstereolithography: concepts and applications", EMERGING TECHNOLOGIES AND FACTORY AUTOMATION, 2001. PROCEEDINGS. 2001 8TH IEEE INTERNATIONAL CONFERENCE ON OCT. 15-18, 2001, PISCATAWAY, NJ, USA,IEEE, 15 October 2001 (2001-10-15), pages 289 - 298vol.2, XP032155782, ISBN: 978-0-7803-7241-2, DOI: 10.1109/ETFA.2001.997697
Attorney, Agent or Firm:
SCHNEIDERS & BEHRENDT PARTMBB et al. (DE)
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