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Title:
METHOD FOR PRODUCING NITRIDE SEMICONDUCTOR ULTRAVIOLET LIGHT EMITTING ELEMENT, AND NITRIDE SEMICONDUCTOR ULTRAVIOLET LIGHT EMITTING ELEMENT
Document Type and Number:
WIPO Patent Application WO/2018/150651
Kind Code:
A1
Abstract:
Provided is a method for producing a nitride semiconductor ultraviolet light emitting element having a peak emission wavelength of 285 nm or less, the method comprising: a first step for forming an n-type semiconductor layer that is constituted of an n-type AlXGa1-XN (1 ≥ X ≥ 0.5) semiconductor, on the top surface of a base part including a sapphire substrate; a second step for forming, above the n-type semiconductor layer, an active layer including a light emitting layer that is constituted of an AlYGa1-YN (X > Y > 0) semiconductor, the entire of the active layer being constituted of an AlGaN type semiconductor; and a third step for forming, above the active layer, a p-type semiconductor layer that is constituted of a p-type AlZGa1-ZN(1 ≥ Z > Y) semiconductor. In this production method, the growth temperature in the second step is higher than 1200ºC and is equal to or higher than the growth temperature in the first step.

Inventors:
HIRANO, Akira (1-5-1, Asahigaoka, Hakusan-sh, Ishikawa 04, 〒9240004, JP)
NAGASAWA, Yosuke (1-5-1, Asahigaoka, Hakusan-sh, Ishikawa 04, 〒9240004, JP)
CHICHIBU, Shigefusa (2-1-1 Katahira, Aoba-ku, Sendai-sh, Miyagi 77, 〒9808577, JP)
KOJIMA, Kazunobu (2-1-1 Katahira, Aoba-ku, Sendai-sh, Miyagi 77, 〒9808577, JP)
Application Number:
JP2017/040170
Publication Date:
August 23, 2018
Filing Date:
November 08, 2017
Export Citation:
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Assignee:
SOKO KAGAKU CO., LTD. (1-5-1, Asahigaoka Hakusan-sh, Ishikawa 04, 〒9240004, JP)
International Classes:
H01L33/32; H01L21/205
Domestic Patent References:
WO2017013729A12017-01-26
Foreign References:
JP2011187591A2011-09-22
JP2012089754A2012-05-10
JP2002280610A2002-09-27
US20140103289A12014-04-17
Attorney, Agent or Firm:
MASAKI, Yoshifumi (Yodoyabashi NAO Bldg. 7F, 3-6 Imabashi 4-chome Chuo-ku, Osaka-sh, Osaka 42, 〒5410042, JP)
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