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Title:
METHOD FOR PRODUCING OLIGOSILANE AND DEVICE FOR PRODUCING OLIGOSILANE
Document Type and Number:
WIPO Patent Application WO/2018/079484
Kind Code:
A1
Abstract:
Provided is a method for producing oligosilane with which the desired oligosilane can be produced more efficiently. The oligosilane-containing reaction mixture fluid obtained by dehydrocondensation of hydrosilane is fed to a membrane separator under specific conditions and brought into contact with an adsorbent under specific conditions.

More Like This:
WO/2011/036366PRODUCTION OF SILANES BY GRINDING SILICON GRAINS IN A HYDROGEN ATMOSPHERE
WO/2013/003148PROCESSES FOR PRODUCING SILANE IN A BUBBLE COLUMN
Inventors:
NOMURA KIYOSHI (JP)
UCHIDA HIROSHI (JP)
Application Number:
PCT/JP2017/038181
Publication Date:
May 03, 2018
Filing Date:
October 23, 2017
Export Citation:
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Assignee:
SHOWA DENKO KK (JP)
International Classes:
C01B33/04; B01D53/04; B01D69/00; B01D71/02; B01J29/48
Domestic Patent References:
WO2016027743A12016-02-25
WO2015060189A12015-04-30
Foreign References:
JP2013520389A2013-06-06
JP2012507455A2012-03-29
JP2014529560A2014-11-13
JPH11260729A1999-09-24
Attorney, Agent or Firm:
HIRAKAWA, Akira et al. (JP)
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