METHOD FOR PRODUCING PATTERNED SUBSTRATE

Title:

METHOD FOR PRODUCING PATTERNED SUBSTRATE

Document Type and Number:

WIPO Patent Application WO/2016/053007

Kind Code:

A1

Abstract:

The present application relates to a method for producing a patterned substrate. The method can be applied, for example, in the production process for apparatuses such as electronic devices and integrated circuits, or in other uses such as, for instance, the production of integrated optical systems, guidance and detection patterns of magnetic-domain memory, flat displays, liquid crystal displays (LCD), thin-film magnetic heads or organic light-emitting diodes and the like, and can be used to create a surface pattern to be used in producing a discrete track medium of integrated circuits, magnetic storage devices such as bit-patterned mediums and/or hard drives, and the like.

Inventors:

KU SE JIN (KR)
LEE MI SOOK (KR)
RYU HYUNG JU (KR)
KIM JUNG KEUN (KR)
YOON SUNG SOO (KR)
PARK NO JIN (KR)
LEE JE GWON (KR)
CHOI EUN YOUNG (KR)

Application Number:

PCT/KR2015/010330

Publication Date:

April 07, 2016

Filing Date:

September 30, 2015

Export Citation:

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Assignee:

LG CHEMICAL LTD (KR)

International Classes:

C08F297/00; H01L21/027

Foreign References:

US20100098876A1	2010-04-22
KR20100123920A	2010-11-25
JP2004323773A	2004-11-18
US20090306295A1	2009-12-10
US20080311402A1	2008-12-18

Other References: