Title:
METHOD FOR PRODUCING PHOSPHOR PANEL, PHOSPHOR PANEL, IMAGE INTENSIFIER AND SCANNING-TYPE ELECTRONIC MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2020/170532
Kind Code:
A1
Abstract:
A method for producing a phosphor panel according to the present invention comprises: a step for forming a phosphor layer, which contains a plurality of phosphor particles, on an emission window; a step for forming an organic film on the phosphor layer; a step for forming a metal reflective film on the organic film; a step for removing the organic film by means of firing; and a step for forming an oxide film by means of an atomic layer deposition method, said oxide film covering the surface of the metal reflective film and the surfaces of the phosphor particles in an integrated manner.
Inventors:
HAMANA YASUMASA (JP)
WATANABE HIROYUKI (JP)
SHIMANO KENSHI (JP)
NISHIZAWA HIROJI (JP)
WATANABE HIROYUKI (JP)
SHIMANO KENSHI (JP)
NISHIZAWA HIROJI (JP)
Application Number:
PCT/JP2019/045826
Publication Date:
August 27, 2020
Filing Date:
November 22, 2019
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H01J37/244; H01J1/70; H01J9/22; H01J29/28
Foreign References:
| JP2010267634A | 2010-11-25 | |||
| JPS5216542A | 1977-02-07 | |||
| JPS53118967A | 1978-10-17 | |||
| JPH01243345A | 1989-09-28 | |||
| JP2013216800A | 2013-10-24 | |||
| JP2013093172A | 2013-05-16 | |||
| JPH01243345A | 1989-09-28 | |||
| JP2013216800A | 2013-10-24 |
Other References:
See also references of EP 3929961A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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