METHOD FOR PRODUCING PHOTOELECTRIC CONVERTER AND PHOTOELECTRIC CONVERTER

WIPO Patent Application WO/2013/115275

A1

The method for producing a photoelectric converter of the present invention comprises a preparation step for preparing a substrate (2) that has a photoelectric conversion layer (2a) and is formed from silicon; a first film-formation step for the formation of a first protective film (3) by deposition of aluminum oxide on a top surface (2B) of the substrate (2) using the atom deposition method or chemical vapor deposition method in an atmosphere containing hydrogen; and a second film-formation step for forming a second protective film (4) by deposition of aluminum oxide on the first protective film (3) using sputtering after the first film-formation step. Moreover, the photoelectric converter of the present invention comprises a substrate that has a photoelectric conversion layer and is formed from silicon; a first protective film that is deposited on the substrate and is formed from aluminum oxide; and a second protective film that is deposited on the first protective film and is formed from aluminum oxide, wherein the concentration of hydrogen contained in the first protective film is higher than the concentration of hydrogen contained in the second protective film.

MIYAZAKI SHIRO (JP)
HONJO TOMOFUMI (JP)
NIWA KOJI (JP)
KII HIRONORI (JP)
AONO SHIGEO (JP)
NISHIOKA YOSUKE (JP)

PCT/JP2013/052098

August 08, 2013

January 30, 2013

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KYOCERA CORP (JP)

H01L31/04

WO2011145731A1	2011-11-24
WO2011033826A1	2011-03-24

JP2011249813A	2011-12-08
JP2006332510A	2006-12-07
JPH07162001A	1995-06-23

JAN SCHMIDT ET AL.: "INDUSTRIALLY RELEVANT A1203 DEPOSITION TECHNIQUES FOR THE SURFACE PASSIVATION OF Si SOLAR CELLS", 25TH EUROPEAN PHOTOVOLTAIC SOLAR ENERGY CONFERENCE, September 2010 (2010-09-01)

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