Title:
METHOD FOR PRODUCING PIEZOELECTRIC FILM, PIEZOELECTRIC FILM, PIEZOELECTRIC ACTUATOR AND INKJET HEAD
Document Type and Number:
WIPO Patent Application WO/2008/029575
Kind Code:
A1
Abstract:
Disclosed is a method for producing a piezoelectric film having reduced leakage current, which is obtained by an aerosol deposition method using particles of a piezoelectric material containing no lead. Specifically disclosed is a method for producing a piezoelectric film, which comprises a piezoelectric film-forming step wherein a piezoelectric film is formed by spraying an aerosol containing particles of a piezoelectric material onto the surface of a substrate and having the particles adhere to the substrate surface. This method for producing a piezoelectric film is characterized by using particles of a piezoelectric material containing a solid solution of a main component represented by the general formula (I) below and a sub-component represented by the general formula (II) below which is added in an amount of less than 6 mol% relative to the total amount of the solid solution. General formula (I): {LiX(K1-YNaY)1-X}(Nb1-Z-WTaZSbW)O3 (wherein 0 ≤ x ≤ 0.2, 0 ≤ y ≤ 1, 0 < z ≤ 0.4, and 0 < w ≤ 0.2) General formula (II): ABO3 (wherein A represents Bi, and B represents at least one of Fe, In and Sc)
Inventors:
URAKI, Shingo (Inc. 1, Sakura-machi, Hino-sh, Tokyo 11, 1918511, JP)
Application Number:
JP2007/065152
Publication Date:
March 13, 2008
Filing Date:
August 02, 2007
Export Citation:
Assignee:
Konica Minolta Holdings, Inc. (6-1 Marunouchi 1-chome, Chiyoda-ku Tokyo, 05, 1000005, JP)
コニカミノルタホールディングス株式会社 (〒05 東京都千代田区丸の内一丁目６番１号 Tokyo, 1000005, JP)
コニカミノルタホールディングス株式会社 (〒05 東京都千代田区丸の内一丁目６番１号 Tokyo, 1000005, JP)
International Classes:
C04B35/495; B41J2/16; H01L41/187; H01L41/24
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