Title:
METHOD FOR PRODUCING POLYIMIDE PRECURSOR, METHOD FOR PRODUCING PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR PRODUCING PATTERNED CURED OBJECT, METHOD FOR PRODUCING INTERLAYER DIELECTRIC FILM, COVER COAT LAYER, OR SURFACE-PROTECTIVE FILM, AND METHOD FOR PRODUCING ELECTRONIC COMPONENT
Document Type and Number:
WIPO Patent Application WO/2019/193647
Kind Code:
A1
Abstract:
A method for producing a polyimide precursor having a structural unit represented by formula (1), the method comprising steps (i) and (ii), the step (i) and/or the step (ii) being conducted in a solvent comprising a compound having both an ether bond and an amide bond. (i) A step in which a carboxylic acid anhydride is reacted with a diamine compound to obtain a polyimide precursor having a structural unit represented by formula (2). (ii) A step in which the polyimide precursor having a structural unit represented by formula (2) is reacted with the compound represented by formula (8) and the resultant reaction product is reacted with a compound represented by formula (9) to obtain a polyimide precursor having a structural unit represented by formula (1). (In formula (1), R1 and/or R2 is a group represented by formula (3).)
Inventors:
YONEDA SATOSHI (JP)
ENOMOTO TETSUYA (JP)
ENOMOTO TETSUYA (JP)
Application Number:
PCT/JP2018/014273
Publication Date:
October 10, 2019
Filing Date:
April 03, 2018
Export Citation:
Assignee:
HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD (JP)
International Classes:
C08G73/10; C08F290/06; G03F7/027; G03F7/40
Domestic Patent References:
WO2016147958A1 | 2016-09-22 | |||
WO2015012385A1 | 2015-01-29 | |||
WO2018038309A1 | 2018-03-01 |
Foreign References:
JP2003122004A | 2003-04-25 | |||
JP2001125266A | 2001-05-11 | |||
JP2001214057A | 2001-08-07 | |||
JP2017517582A | 2017-06-29 | |||
JPS61254547A | 1986-11-12 | |||
JP2001154365A | 2001-06-08 |
Attorney, Agent or Firm:
HEIWA INTERNATIONAL PATENT OFFICE (JP)
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