Title:
METHOD FOR PRODUCING SEMICONDUCTOR GAS
Document Type and Number:
WIPO Patent Application WO/2011/102268
Kind Code:
A1
Abstract:
Disclosed is a method for producing monofluoro methane, which involves at least a pyrolysis step in which a 1-methoxy-1,1,2,2-tetrafluoro ethane is pyrolyzed by bringing same into contact with a catalyst, and a step for collecting monofluoro methane from the pyrolysis product. As a consequence, it is possible to efficiently and practically produce monofluoro methane that essentially does not contain halogens except fluorine.
Inventors:
TAKADA NAOTO
IMURA HIDEAKI
OKAMOTO MASAMUNE
IMURA HIDEAKI
OKAMOTO MASAMUNE
Application Number:
PCT/JP2011/052702
Publication Date:
August 25, 2011
Filing Date:
February 09, 2011
Export Citation:
Assignee:
CENTRAL GLASS CO LTD (JP)
TAKADA NAOTO
IMURA HIDEAKI
OKAMOTO MASAMUNE
TAKADA NAOTO
IMURA HIDEAKI
OKAMOTO MASAMUNE
International Classes:
C07C17/361; C07C19/08; C07C51/58; C07C53/48; C09K13/08; C11D7/30; H01L21/3065; C07B61/00
Domestic Patent References:
| WO2005026090A1 | 2005-03-24 | |||
| WO2010055807A1 | 2010-05-20 | |||
| WO2010098220A1 | 2010-09-02 |
Foreign References:
| JPH0892162A | 1996-04-09 | |||
| JPS60116637A | 1985-06-24 | |||
| JPS5640617A | 1981-04-16 |
Other References:
DAVID C. ENGLAND: "Catalytic Conversion of Fluoroalkyl Alkyl Ethers to Carbonyl Compounds", JOURNAL OF ORGANIC CHEMISTRY, vol. 49, no. 21, 1984, pages 4007 - 4008
Attorney, Agent or Firm:
HASHIMOTO, Takeshi et al. (JP)
Hashimoto 剛 (JP)
Hashimoto 剛 (JP)
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