Title:
METHOD FOR PRODUCING SPECTROSCOPIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2012/070301
Kind Code:
A1
Abstract:
A method for producing a spectroscopic sensor (1) involves a first step for forming a cavity layer (21) on a handle substrate by means of a nanoimprint method, a second step carried out after the first step and for forming a first mirror layer (22) on the cavity layer (21), a third step carried out after the second step and for bonding a light transmissive substrate (3) to the first mirror layer (22), a fourth step carried out after the third step and for removing the handle substrate from the cavity layer (21), a fifth step carried out after the fourth step and for forming a second mirror layer (23) on the cavity layer (21) from which the handle substrate was removed, and a sixth step carried out after the fifth step and for bonding a light detecting substrate (4) to the second mirror layer (23).
Inventors:
SHIBAYAMA KATSUMI (JP)
TAKASAKA MASAOMI (JP)
TAKASAKA MASAOMI (JP)
Application Number:
PCT/JP2011/071535
Publication Date:
May 31, 2012
Filing Date:
September 21, 2011
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
SHIBAYAMA KATSUMI (JP)
TAKASAKA MASAOMI (JP)
SHIBAYAMA KATSUMI (JP)
TAKASAKA MASAOMI (JP)
International Classes:
G01J1/04; G01J3/26; G01J3/36; G02B5/20
Domestic Patent References:
| WO2006100903A1 | 2006-09-28 |
Foreign References:
| JP2001210810A | 2001-08-03 | |||
| JP2000081512A | 2000-03-21 | |||
| JPS6457134A | 1989-03-03 | |||
| JP2003270042A | 2003-09-25 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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