Title:
METHOD FOR PRODUCING STRUCTURAL BODY AND APPARAUS FOR PRODUCING STRUCTURAL BODY
Document Type and Number:
WIPO Patent Application WO/2021/162083
Kind Code:
A1
Abstract:
This method for producing a structural body comprises: a step for preparing an etching object, at least the upper surface of which is configured from a group III nitride crystal, and an alkaline or acidic etching liquid which contains peroxodisulfate ions serving as an oxidant that accepts electrons; and a step for irradiating the upper surface of the etching object with light, while rotating the etching object in such a state where the upper surface of the etching object is immersed in the etching liquid that has been heated so as to generate sulfate ion radicals.
Inventors:
HORIKIRI FUMIMASA (JP)
FUKUHARA NOBORU (JP)
FUKUHARA NOBORU (JP)
Application Number:
PCT/JP2021/005225
Publication Date:
August 19, 2021
Filing Date:
February 12, 2021
Export Citation:
Assignee:
SCIOCS CO LTD (JP)
SUMITOMO CHEMICAL CO (JP)
SUMITOMO CHEMICAL CO (JP)
International Classes:
H01L21/3063
Domestic Patent References:
| WO2007058284A1 | 2007-05-24 |
Foreign References:
| JP2004356609A | 2004-12-16 | |||
| JP2004006718A | 2004-01-08 | |||
| JP2014154754A | 2014-08-25 | |||
| JPH06252449A | 1994-09-09 | |||
| JP2012169562A | 2012-09-06 | |||
| JP2008527717A | 2008-07-24 | |||
| JP2015532009A | 2015-11-05 | |||
| JP2006060200A | 2006-03-02 |
Attorney, Agent or Firm:
FUKUOKA Masahiro et al. (JP)
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