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Title:
METHOD FOR PRODUCING TETRAALKYLAMMONIUM SALT SOLUTION
Document Type and Number:
WIPO Patent Application WO/2013/062100
Kind Code:
A1
Abstract:
[Problem] To efficiently remove a metal ion from solution containing a metal ion and tetraalkylammonium ion, such as resist development waste solution or the like. [Solution] A solution containing a metal ion and tetraalkylammonium ion and a cation-exchange resin are brought into contact, the ions are adsorbed to the resin, and then eluted by alkali metal salt solution. Not only the alkali metal ion but also tetraalkylammonium salt solution, of a lower concentration than this metal ion, can be recovered by monitoring the alkali metal ion concentration in the eluate and switching the recovery pathway before the alkali metal ion concentration rises suddenly. The recovered tetraalkylammonium salt can be made into tetraalkylammonium hydroxide by electrolysis. Sodium carbonate aqueous solution is most preferred as the alkali metal salt solution in terms of lack of interference during electrolysis, cost, and the like.

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Inventors:
WATANABE JUN (JP)
UMEZU NAOYUKI (JP)
YAMASHITA YOSHIFUMI (JP)
Application Number:
PCT/JP2012/077779
Publication Date:
May 02, 2013
Filing Date:
October 26, 2012
Export Citation:
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Assignee:
TOKUYAMA CORP (JP)
International Classes:
C07C209/84; B01J49/00; C02F1/42; C07C211/63; G03F7/32
Domestic Patent References:
WO2011074495A12011-06-23
WO2012090699A12012-07-05
Foreign References:
JP2011012044A2011-01-20
JP2004512315A2004-04-22
JP2003340449A2003-12-02
Other References:
KENJI SAKAI ET AL.: "Ion Kokan Jushi-ho ni yoru TMAH no Bunri, Kaishu Process no Kaihatsu", SHIGEN SOZAI 2004(MORIOKA), THE MINING AND MATERIALS PROCESSING INSTITUTE OF JAPAN, 2004, pages 217 - 218
Attorney, Agent or Firm:
MAEDA & SUZUKI (JP)
Maeda and a Suzuki international patent business corporation (JP)
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