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Patent Searching and Data


Title:
METHOD FOR PRODUCING TFT SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2019/104836
Kind Code:
A1
Abstract:
A method for producing a thin-film transistor (TFT) substrate (S10), comprising the following steps: providing a substrate (100); sequentially forming a protection layer (207), an aluminum thin film (208) and a photoresist layer (209) on the substrate (100); patterning the photoresist layer (209) and the aluminum thin film (208); etching the protection layer (207), wherein the edge of the protection layer (207) contracts inwards relative to the edge of the aluminum thin film (208) so as to form a groove (211) between the aluminum thin film (208) and the substrate (100); depositing a functional film layer (212) on the substrate (100), wherein the functional film layer (212) comprises a first functional film layer (213) located on the photoresist layer (209) and a second functional film layer (214) located on a surface of the substrate (100); and forming an opening of the groove (211) between the aluminum thin film (208) and the second functional film layer (214); and placing the aluminum thin film (208) and the photoresist layer (209) into a stripping solution, the stripping solution filling the groove (211) by means of the opening of the groove (211) and reacting with the aluminum thin film (208) such that the aluminum thin film (208) and the photoresist layer (209) separate from the protection layer (207).

Inventors:
JIANG, Zhixiong (No. 9-2, Tangming RdGuangming New Distric, Shenzhen Guangdong 2, 518132, CN)
Application Number:
CN2018/071612
Publication Date:
June 06, 2019
Filing Date:
January 05, 2018
Export Citation:
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Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD. (No. 9-2, Tangming Rd Gongming Street,Guangming New Distric, Shenzhen Guangdong 2, 518132, CN)
International Classes:
H01L27/12
Attorney, Agent or Firm:
SCIHEAD IP LAW FIRM (Room 1508, Huihua Commercial & Trade BuildingNo. 80, Xianlie Zhong Road, Yuexiu Distric, Guangzhou Guangdong 0, 510070, CN)
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