Title:
METHOD FOR PRODUCING THIN FILM MADE FROM OXIDE OF TITANIUM OR TITANIUM ALLOY AND HAVING SEALED MICROPORES
Document Type and Number:
WIPO Patent Application WO/2020/179427
Kind Code:
A1
Abstract:
An electrolytic treatment apparatus 1 is equipped with a treatment vessel 2 and a negative electrode member 4 and a positive electrode member 5 both installed in the treatment vessel 2, wherein the negative electrode member 4 and the positive electrode member 5 are connected to a minus electrode and a plus electrode, respectively, of a direct-current power supply 3. In the electrolytic treatment apparatus 1, the positive electrode member 5 serves as a member to be treated, and a member prepared using a titanium- or titanium-alloy-made thin film is used as the positive electrode member 5. An electrolyzed sulfuric acid solution S in which a hydrogen fluoride compound is dissolved at a concentration of 0.5% by weight or less and having an oxidizing agent concentration of 5 g/L or more is placed in the treatment vessel 2, and then an electrolytic treatment is carried out at a current density of 1 to 20 A/dm2 (pore-opening step). Subsequently, an electrolytic treatment is carried out at a current density of 0.1 A/dm2 or less (pore-sealing step). Thus, a method for producing a thin film made from an oxide of titanium or a titanium alloy and having sealed micropores is provided.
Inventors:
MATSUDA TAKUYA (JP)
YOSHIMURA MINAMI (JP)
NAGAI TATSUO (JP)
YOSHIMURA MINAMI (JP)
NAGAI TATSUO (JP)
Application Number:
PCT/JP2020/006170
Publication Date:
September 10, 2020
Filing Date:
February 18, 2020
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
International Classes:
C25D11/26
Foreign References:
| JP2011047014A | 2011-03-10 | |||
| JP2011202206A | 2011-10-13 | |||
| JP2009197284A | 2009-09-03 | |||
| JP2006097117A | 2006-04-13 | |||
| JP2019073746A | 2019-05-16 |
Attorney, Agent or Firm:
HAYAKAWA Yuzi et al. (JP)
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