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Title:
METHOD FOR PRODUCING TRANSPARENT GAS-BARRIER FILM, DEVICE FOR PRODUCING TRANSPARENT GAS-BARRIER FILM, AND ORGANIC ELECTROLUMINESCENCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/122987
Kind Code:
A1
Abstract:
 The method for producing transparent gas-barrier film of the present invention is implemented using the roll-to-roll process. This production method contains a step in which a long strip-shaped resin substrate (8) is made to alternately pass through a vapor-deposition area in which plasma is generated to vapor-deposit a material containing at least one metal or metalloid, and a non-vapor deposition area in which the material is not deposited, thereby vapor-depositing a plurality of layers on the long strip-shaped resin substrate (8). By varying the distance between the resin substrate (8) and the plasma source (52) in the vapor-deposition area, a transparent gas-barrier layer having a plurality of layers in which the density varies continuously in the thickness direction is formed on the resin substrate (8).

Inventors:
YAMADA YASUMI (JP)
Application Number:
PCT/JP2014/051187
Publication Date:
August 14, 2014
Filing Date:
January 22, 2014
Export Citation:
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Assignee:
NITTO DENKO CORP (JP)
International Classes:
C23C14/06; B32B15/08; C23C14/56; C23C16/54; H01L51/50; H05B33/02; H05B33/10
Domestic Patent References:
WO2010100971A12010-09-10
WO2006033233A12006-03-30
Foreign References:
JP2012087359A2012-05-10
JPH08164595A1996-06-25
JP2004151528A2004-05-27
JP2996516B22000-01-11
JP2007230115A2007-09-13
JP2009023284A2009-02-05
JP2009209438A2009-09-17
JP4472962B22010-06-02
Attorney, Agent or Firm:
MAKOTO INTERNATIONAL PATENT ATTORNEYS OFFICE (JP)
Patent business corporation Makoto Patent Attorneys Office (JP)
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