Title:
METHOD FOR PRODUCING TRICHLOROSILANE AND DEVICE FOR PRODUCING TRICHLOROSILANE
Document Type and Number:
WIPO Patent Application WO/2019/098344
Kind Code:
A1
Abstract:
This production method is a method for producing trichlorosilane, wherein a lead-in flow path (f1), a lead-out flow path (f2), a discharge flow path (f31), and a discharge flow path (f32) through which a metallic silicon powder passes in a trichlorosilane production system are opened/closed by using non-slide valves (b1-b4) each including a valve body provided rotatably to a valve seat in a non-contact state.
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Inventors:
HIROTA KENJI (JP)
OGIHARA KATSUYA (JP)
OGIHARA KATSUYA (JP)
Application Number:
PCT/JP2018/042556
Publication Date:
May 23, 2019
Filing Date:
November 16, 2018
Export Citation:
Assignee:
TOKUYAMA CORP (JP)
International Classes:
C01B33/107; F16K1/24; F16K31/44; F16K5/06; F16K5/20
Foreign References:
| JP2014523842A | 2014-09-18 | |||
| JPH08105552A | 1996-04-23 | |||
| CN202659960U | 2013-01-09 | |||
| JP2009120468A | 2009-06-04 |
Other References:
See also references of EP 3715325A4
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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