Title:
METHOD FOR PRODUCING VARIABLE RESISTANCE ELEMENT, AND VARIABLE RESISTANCE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2018/193759
Kind Code:
A1
Abstract:
[Problem] To produce a variable resistance element having excellent electrical characteristics at low cost.
[Solution] A method for producing a variable resistance element according to the present invention comprises the formation of a first titanium nitride electrode layer on a substrate. A first metal oxide layer having a first resistivity is formed on the first titanium nitride electrode layer. A second metal oxide layer having a second resistivity that is different from the first resistivity is formed on the first metal oxide layer. A second titanium nitride electrode layer is formed on the second metal oxide layer by a sputtering method, while applying a bias voltage to the substrate.
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Inventors:
MIYAGUCHI YUUSUKE (JP)
JINBO TAKEHITO (JP)
MANITA SHUN (JP)
OHTA SHUNPEI (JP)
AHN HYUNG-WOO (JP)
JINBO TAKEHITO (JP)
MANITA SHUN (JP)
OHTA SHUNPEI (JP)
AHN HYUNG-WOO (JP)
Application Number:
PCT/JP2018/009978
Publication Date:
October 25, 2018
Filing Date:
March 14, 2018
Export Citation:
Assignee:
ULVAC INC (JP)
International Classes:
H01L21/8239; C23C14/06; C23C14/08; C23C14/34; H01L27/105; H01L45/00; H01L49/00
Domestic Patent References:
| WO2012073471A1 | 2012-06-07 | |||
| WO2015125449A1 | 2015-08-27 | |||
| WO2011052354A1 | 2011-05-05 |
Foreign References:
| JP2013207130A | 2013-10-07 | |||
| JP2015065240A | 2015-04-09 | |||
| JP2013058691A | 2013-03-28 |
Attorney, Agent or Firm:
OMORI, Junichi (JP)
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