METHOD FOR PRODUCING ZINC OXIDE FILM

Title:

METHOD FOR PRODUCING ZINC OXIDE FILM

Document Type and Number:

WIPO Patent Application WO/2017/163494

Kind Code:

A1

Abstract:

Provided is a method with which a highly uniform zinc oxide film can be formed on a zinc oxide ceramic substrate using a wet method. This method includes: a step in which a base film composed of a material having an amorphous structure or crystalline structure other than wurtzite is formed on a zinc oxide ceramic substrate; a step in which a seed layer composed of a zinc oxide is formed by converting the base film to a zinc oxide or depositing a zinc oxide on the base film; and a step in which a zinc oxide film is formed on the seed layer using a wet method.

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Inventors:

KONDO TAKAYUKI (JP)
YOSHIKAWA JUN (JP)

Application Number:

PCT/JP2016/086099

Publication Date:

September 28, 2017

Filing Date:

December 05, 2016

Export Citation:

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Assignee:

NGK INSULATORS LTD (JP)

International Classes:

C01G9/02; C04B35/453; C04B41/85; C23C14/08; C23C14/58; C23C16/40; C23C16/56; C23C28/00; H01B13/00

Foreign References:

JP2014234325A	2014-12-15
JP2013239436A	2013-11-28
JP2009167037A	2009-07-30
JP2009040640A	2009-02-26
JP2008230878A	2008-10-02
JP2006069840A	2006-03-16