Title:
METHOD FOR THE PRODUCTION OF A MULTISTABLE FLEXIBLE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2014/072317
Kind Code:
A3
Abstract:
The invention relates to a method for the production of a multistable flexible element (5), consisting in: etching a silicon component (S) in which a beam (P) connects two ends (E1; E2) of a rigid mass (MU) having a cross-section more than ten times greater than that of the beam (P); growing SiO2, at 1100°C, for a period adjusted to obtain: at the beam (P), a first ratio (RA) greater than 1 between the cross-section of a first peripheral layer (CP1) of SiO2 and that of a first silicon core (A1); and, at the mass (MU), a second ratio (RB) between the cross-section of a second peripheral layer (CP2) of SiO2 and that of a second silicon core (A2), which is less than one hundredth of the first ratio (RA); cooling to ambient temperature in order to buckle the beam (P) during the cooling of the mass (MU), said mass contracting more than the beam (P).
Inventors:
STRANCZL MARC (CH)
HESSLER THIERRY (CH)
HESSLER THIERRY (CH)
Application Number:
PCT/EP2013/073116
Publication Date:
July 03, 2014
Filing Date:
November 06, 2013
Export Citation:
Assignee:
NIVAROX SA (CH)
International Classes:
G04B15/14; G04B17/26
Domestic Patent References:
| WO2007000271A1 | 2007-01-04 |
Foreign References:
| EP1562207A1 | 2005-08-10 | |||
| EP2407831A1 | 2012-01-18 |
Attorney, Agent or Firm:
ICB INGÉNIEURS CONSEILS EN BREVETS SA (Fbg de l'Hôpital 3, Neuchâtel, CH)
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