Title:
METHOD FOR PRODUCTION OF A THERMOELECTRIC APPARATUS
Document Type and Number:
WIPO Patent Application WO/2009/156382
Kind Code:
A3
Abstract:
The invention relates to a method for production of at least one thermoelectric apparatus with the steps of: Preparation of a first wafer (1) which is formed from a thermoelectric material of a first conductivity type; Preparation of a second wafer which is formed from a thermoelectric material of a second conductivity type; Structuring of the first wafer (1) so that a group of first thermoelectric structures (7) is produced; Structuring of the second wafer so that a group of second thermoelectric structures is produced; Linking of the first to the second wafer in such a manner that the first and the second thermoelectric structures are electrically connected together and thus form the thermoelectric apparatus. According to the invention, before the structuring of the first wafer (1), a first contact material (3) is deposited onto the first wafer (1) and/or before the structuring of the second wafer, a second contact material is deposited onto the second wafer.
Inventors:
NURNUS JOACHIM (DE)
VOLKERT FRITZ (CH)
SCHUBERT AXEL
VOLKERT FRITZ (CH)
SCHUBERT AXEL
Application Number:
PCT/EP2009/057780
Publication Date:
October 07, 2010
Filing Date:
June 23, 2009
Export Citation:
Assignee:
MICROPELT GMBH (DE)
NURNUS JOACHIM (DE)
VOLKERT FRITZ (CH)
SCHUBERT AXEL
NURNUS JOACHIM (DE)
VOLKERT FRITZ (CH)
SCHUBERT AXEL
International Classes:
H01L27/16; H01L35/34
Domestic Patent References:
| WO2003105244A1 | 2003-12-18 |
Foreign References:
| EP1118127A1 | 2001-07-25 |
Other References:
See also references of EP 2301075A2
Attorney, Agent or Firm:
STAROSKE, Sandro et al. (Postfach 15 09 20, Berlin, DE)
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