Title:
METHOD FOR PROVIDING SILICON COATING ON INNER WALL OF FLUIDIZED BED
Document Type and Number:
WIPO Patent Application WO/2024/027340
Kind Code:
A1
Abstract:
The present invention relates to a method for providing a silicon coating on the inner wall of a fluidized bed, comprising: a step of introducing silicon-coating reaction gas into a fluidized bed, the silicon-coating reaction gas comprising silane and hydrogen, the molar ratio of silane to hydrogen being 0.2% to 8%, and the flow velocity of the silicon-coating reaction gas being 0.3 m/s to 1.5 m/s; a step of heating the fluidized bed, a heating temperature of the inner wall of the fluidized bed ranging from 300°C to 900°C; and a step of discharging silicon-coating tail gas from the fluidized bed, the silicon-coating tail gas being the gas obtained after the silicon-coating reaction gas reacts inside the fluidized bed. According to the present invention, a high-purity silicon coating having an appropriate thickness can be formed on the inner wall of the fluidized bed, and the silicon coating ensures that the inner wall of the fluidized bed is less likely to be exposed under the friction of granular silicon products in the fluidized bed.
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Inventors:
ZHU GONGSHAN (CN)
LAN TIANSHI (CN)
CHANG LULU (CN)
LAN TIANSHI (CN)
CHANG LULU (CN)
Application Number:
PCT/CN2023/099424
Publication Date:
February 08, 2024
Filing Date:
June 09, 2023
Export Citation:
Assignee:
JIANGSU ZHONGNENG POLYSILICON TECH DEVELOPMENT CO LTD (CN)
International Classes:
C01B33/03; C01B33/02; C04B35/565; C30B11/00; F27B15/14
Foreign References:
| JPH06127915A | 1994-05-10 | |||
| JPH03150288A | 1991-06-26 | |||
| CN103172381A | 2013-06-26 | |||
| US4906441A | 1990-03-06 |
Attorney, Agent or Firm:
GRANDALL (NANJING) LAW FIRM (CN)
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