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Title:
A METHOD FOR PURIFICATION OF ACIDS FOR USE IN SEMICONDUCTOR PROCESSING
Document Type and Number:
WIPO Patent Application WO1998026449
Kind Code:
A3
Abstract:
A method of making high purity acids and their derivatives, particularly citric acid and ammonium citrate. These purified compositions are useful in the manufacture of integrated circuits for the semiconductor industry. Purification is done using strong acid ion exchange resins. 00000

Inventors:
HACKETT THOMAS B (US)
Application Number:
US9722736W
Publication Date:
October 01, 1998
Filing Date:
December 08, 1997
Export Citation:
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Assignee:
ASHLAND INC.
HACKETT, THOMAS, B.
International Classes:
C07C51/42; C07C51/41; C07C51/47; C07C55/06; C07C59/265; H01L21/304; (IPC1-7): H01L/
Foreign References:
FR2674848A11992-10-09
Other References:
ALDRICH, Catalog Handbook of Fine Chemicals, 1994, page 98.
See also references of EP 0966421A2
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