Title:
METHOD FOR RECOVERING DIMETHYL SULFOXIDE FROM RECOVERED RESIST REMOVER
Document Type and Number:
WIPO Patent Application WO/2019/026868
Kind Code:
A1
Abstract:
A method for recovering dimethyl sulfoxide, which comprises a step wherein water and a recovered resist remover that contains dimethyl sulfoxide and at least one compound selected from the group consisting of glycol ethers, glycols and triols are brought into contact with each other and distilled.
Inventors:
MAYAHARA KUNIO (JP)
TAMURA KOJI (JP)
TAKEDA AKINOBU (JP)
TAMURA KOJI (JP)
TAKEDA AKINOBU (JP)
Application Number:
PCT/JP2018/028539
Publication Date:
February 07, 2019
Filing Date:
July 31, 2018
Export Citation:
Assignee:
KURARAY CO (JP)
International Classes:
C07C315/06; C07C317/04
Foreign References:
| JP2010537231A | 2010-12-02 | |||
| JP2005288329A | 2005-10-20 | |||
| JPH09278743A | 1997-10-28 | |||
| JP2006069960A | 2006-03-16 | |||
| JP2004043434A | 2004-02-12 |
Attorney, Agent or Firm:
ARINAGA, Shun (JP)
Download PDF: