METHOD FOR RECOVERING INDIUM-TIN ALLOY FROM ITO TARGET SCRAP AND METHODS FOR PRODUCING INDIUM OXIDE-TIN OXIDE POWDER AND ITO TARGET

WIPO Patent Application WO/2014/112198

A1

Provided is a method for reducing ITO target scrap containing indium and tin, by using a reduction gas, and recovering an indium-tin alloy being a raw material for an ITO target, while maintaining the composition ratio of the metal components in the ITO, in a reduction furnace. Provided is a technology: for recovering an indium-tin alloy from a high-purity indium oxide-tin-containing scrap generated during production or after use of an ITO sputtering target; for using same as an indium oxide-tin oxide powder; and for producing an ITO target having the indium oxide-tin oxide powder as a raw material therefor. In other words, the technology reduces the scrap to an alloy as is, uses same in ITO production while maintaining the composition of the obtained alloy, and thereby simplifies the control and adjustment of the composition during the production stage. In addition, the process is simplified by oxide reduction being the only the indium-tin recycling, and production costs can be reduced in comparison to conventional technology. In addition, the byproduct can be water only, therefore handling and generation of toxic substances are reduced and, as a result, the load on the environment can be reduced.

TAKEMOTO KOUICHI (JP)
KOSHO TAKASHI (JP)
KONAKA MITSUYUKI (JP)

PCT/JP2013/080994

July 24, 2014

November 18, 2013

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JX NIPPON MINING & METALS CORP (JP)

C22B7/00; C22B5/12; C22B25/06; C22B58/00; C22C28/00; C23C14/34; C25B1/00

JPH07145432A	1995-06-06
JPH06329415A	1994-11-29
JP2011208216A	2011-10-20

OGOSHI Isamu et al. (JP)
Isamu Ogoshi (JP)

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