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Title:
METHOD OF RECOVERING SILICON-CONTAINING MATERIAL
Document Type and Number:
WIPO Patent Application WO/2007/108308
Kind Code:
A1
Abstract:
A method by which a silicon-containing material from which a coolant has been removed is recovered. The method of recovering a silicon-containing material is characterized by comprising the steps of: removing beforehand a water-soluble coolant from a spent slurry resulting from a silicon wafer production process which comprises the water-soluble coolant, abrasive grains, and silicon particles to thereby obtain a solid matter; extracting from the solid matter the water-soluble coolant remaining in the solid matter with a low-boiling organic solvent which has compatibility with the water-soluble coolant and has a lower boiling point than the water-soluble coolant; removing by centrifugal separation the low-boiling organic solvent used in the extraction; and recovering the solid matter obtained by the centrifugal separation.

Inventors:
KAJIMOTO KIMIHIKO
HOJO YOSHIYUKI
TANAKA MASAYA (JP)
TAKAHASHI KATSUMI (JP)
OOBA TOMOYUKI (JP)
HIRAKAWA HIROYUKI (JP)
Application Number:
PCT/JP2007/054200
Publication Date:
September 27, 2007
Filing Date:
March 05, 2007
Export Citation:
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Assignee:
SHARP KK (JP)
ISHIKAWAJIMA HANYOKI SERVICE C (JP)
KAJIMOTO KIMIHIKO
HOJO YOSHIYUKI
TANAKA MASAYA (JP)
TAKAHASHI KATSUMI (JP)
OOBA TOMOYUKI (JP)
HIRAKAWA HIROYUKI (JP)
International Classes:
C01B33/02; B01D11/04; B01D21/26
Foreign References:
JP2002293528A2002-10-09
JP2001278612A2001-10-10
JP2005330149A2005-12-02
Attorney, Agent or Firm:
NOGAWA, Shintaro (Minamimorimachi Park Bldg., 1-3, Nishitenma 5-chome,, Kita-ku, Osaka-sh, Osaka47, JP)
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