Title:
METHOD FOR REFINING FLUORINE-BASED-SOLVENT-CONTAINING ARTICLE, AND REFINED FLUORINE-BASED-SOLVENT-CONTAINING ARTICLE
Document Type and Number:
WIPO Patent Application WO/2020/031732
Kind Code:
A1
Abstract:
Provided are a refining method for reducing microparticles included in a fluorine-based-solvent-containing article, and a refined fluorine-based-solvent-containing article in which microparticles are reduced. This method for refining a fluorine-based-solvent-containing article includes a filtration step in which a fluorine-based-solvent-containing article that includes at least a fluorine-based solvent is filtered using a filter comprising a material that includes fluorine atoms, the method being such that the fluid speed per unit of effective filtration area of the filter when the fluorine-based-solvent-containing article is filtered is less than 0.2 mL/min⋅cm2.
Inventors:
SUGAWARA MITSURU (JP)
OTA KEISUKE (JP)
KANAUCHI MASANOBU (JP)
OTA KEISUKE (JP)
KANAUCHI MASANOBU (JP)
Application Number:
PCT/JP2019/029301
Publication Date:
February 13, 2020
Filing Date:
July 25, 2019
Export Citation:
Assignee:
ZEON CORP (JP)
International Classes:
B01D61/14; B01D71/36; C07C23/08; C07C29/74; H01L21/304
Domestic Patent References:
| WO2018043697A1 | 2018-03-08 | |||
| WO2018051716A1 | 2018-03-22 | |||
| WO2018062470A1 | 2018-04-05 |
Foreign References:
| JP2005239615A | 2005-09-08 | |||
| JP2002045606A | 2002-02-12 | |||
| JP2008208048A | 2008-09-11 |
Attorney, Agent or Firm:
SUGIMURA Kenji (JP)
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