Title:
METHOD OF REGENERATING COOLANT AND METHOD OF REGENERATING SLURRY
Document Type and Number:
WIPO Patent Application WO/2010/001961
Kind Code:
A1
Abstract:
A method of regenerating a coolant is provided with which a regenerated slurry can be inhibited from having an increased viscosity.
The method of coolant regeneration comprises subjecting a spent slurry discharged after the cutting of a silicon ingot with a slurry containing abrasive grains and a water-soluble coolant to at least a distillation step to obtain a distilled coolant and obtaining a regenerated coolant therefrom, wherein the distilled coolant comprises at least 5 wt.% water and at least 80 wt.% propylene glycol.
Inventors:
KAJIMOTO, Kimihiko (())
梶本 公彦 (())
HOJO, Yoshiyuki (())
北條 義之 (())
OKUNO, Tetsuhiro (())
梶本 公彦 (())
HOJO, Yoshiyuki (())
北條 義之 (())
OKUNO, Tetsuhiro (())
Application Number:
JP2009/062126
Publication Date:
January 07, 2010
Filing Date:
July 02, 2009
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町22番22号 Osaka, 〒5458522, JP)
SANYO CHEMICAL INDUSTRIES, LTD. (11-1, Ikkyo Nomoto-cho Higashiyama-ku, Kyoto-sh, Kyoto 95, 〒6050995, JP)
三洋化成工業株式会社 (〒95 京都府京都市東山区一橋野本町11番地の1 Kyoto, 〒6050995, JP)
KAJIMOTO, Kimihiko (())
梶本 公彦 (())
HOJO, Yoshiyuki (())
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町22番22号 Osaka, 〒5458522, JP)
SANYO CHEMICAL INDUSTRIES, LTD. (11-1, Ikkyo Nomoto-cho Higashiyama-ku, Kyoto-sh, Kyoto 95, 〒6050995, JP)
三洋化成工業株式会社 (〒95 京都府京都市東山区一橋野本町11番地の1 Kyoto, 〒6050995, JP)
KAJIMOTO, Kimihiko (())
梶本 公彦 (())
HOJO, Yoshiyuki (())
International Classes:
B24B57/02; B28D5/00; B28D7/02; H01L21/304
Attorney, Agent or Firm:
NOGAWA, Shintaro (Nogawa Patent Office, Minamimorimachi Park Bldg. 1-3, Nishitenma 5-chome, Kita-ku, Osaka-sh, Osaka 47, 〒5300047, JP)
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