Title:
METHOD FOR REMOVING MICROPARTICLES IN WATER
Document Type and Number:
WIPO Patent Application WO/2020/031616
Kind Code:
A1
Abstract:
With respect to an ultrapure water production process where microparticles in water are removed using an NF membrane or UF membrane having at least one functional group of any of a primary amino group, a secondary amino group, a tertiary amino group, and a quaternary ammonium group, the purpose of the present invention is to suppress the influence of the functional group introduced to the MF membrane or UF membrane and produce high-quality microparticle-free treated water suitable as ultrapure water for use in steps of producing and washing an electronic component. Before removal of microparticles, the MF membrane or UF membrane having at least one functional group of any of a primary amino group, a secondary amino group, a tertiary amino group, and a quaternary ammonium group is washed with an alkaline agent having a pH of 9 or more and then used to remove microparticles.
Inventors:
FUJIMURA YU (JP)
OGAWA YUICHI (JP)
TANAKA YOICHI (JP)
KAWAKATSU TAKAHIRO (JP)
KANEDA MASAYUKI (JP)
MATSUMOTO MITSUAKI (JP)
OGAWA YUICHI (JP)
TANAKA YOICHI (JP)
KAWAKATSU TAKAHIRO (JP)
KANEDA MASAYUKI (JP)
MATSUMOTO MITSUAKI (JP)
Application Number:
PCT/JP2019/027682
Publication Date:
February 13, 2020
Filing Date:
July 12, 2019
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
ASAHI CHEMICAL IND (JP)
ASAHI CHEMICAL IND (JP)
International Classes:
C02F1/44; B01D61/14; B01D65/06; B01D71/82
Domestic Patent References:
| WO2016136650A1 | 2016-09-01 | |||
| WO2008123351A1 | 2008-10-16 | |||
| WO2002013981A1 | 2002-02-21 | |||
| WO2017145419A1 | 2017-08-31 |
Foreign References:
| JP2000317413A | 2000-11-21 | |||
| JP2004122020A | 2004-04-22 | |||
| CN1408653A | 2003-04-09 |
Attorney, Agent or Firm:
SHIGENO, Tsuyoshi et al. (JP)
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