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Title:
METHOD FOR SEPARATING AND RECOVERING ALKYLENE GLYCOL MONOALKYL ETHER, METHOD FOR RECYCLING LIQUID WASTE FROM PROCESSING OF RESIST COMPOSITION, AND METHOD FOR RECYCLING RESIST COMPOSITION PROCESSING LIQUID
Document Type and Number:
WIPO Patent Application WO/2016/017387
Kind Code:
A1
Abstract:
The present invention provides a method for separating and recovering, with a high purity and at a high recovery rate, alkylene glycol monoalkyl ether from a solvent mixture containing: alkylene glycol monoalkyl ether; carboxylic acid ester corresponding thereto; and other solvents. By adding an alkali compound to a solvent mixture that contains: alkylene glycol monoalkyl ether (first solvent); alkylene glycol monoalkyl ether carboxylic acid ester (second solvent) corresponding to the alkylene glycol monoalkyl ether (first solvent); and a solvent (third solvent) other than the alkylene glycol monoalkyl ether (first solvent) and the alkylene glycol monoalkyl ether carboxylic acid ester (second solvent), the alkylene glycol monoalkyl ether carboxylic acid ester (second solvent) is saponified and converted into alkylene glycol monoalkyl ether (first solvent). Thereafter, the alkylene glycol monoalkyl ether (first solvent) is recovered by distillation.

Inventors:
MIKAWA YASUHIRO (JP)
OGATA FUJIMARO (JP)
Application Number:
PCT/JP2015/069667
Publication Date:
February 04, 2016
Filing Date:
July 08, 2015
Export Citation:
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Assignee:
SHOWA DENKO KK (JP)
International Classes:
C07C41/42; B01D3/00; C07C41/44; C07C43/13; G03F7/42
Foreign References:
JPS5589236A1980-07-05
JP2005247816A2005-09-15
JPH01180844A1989-07-18
JPS5195008A1976-08-20
JP2007178589A2007-07-12
JPH08231991A1996-09-10
JP2013540171A2013-10-31
JPH01275544A1989-11-06
JP2011509998A2011-03-31
JPH08507764A1996-08-20
JP2002045602A2002-02-12
JP2001064221A2001-03-13
JP2013506658A2013-02-28
Attorney, Agent or Firm:
AOKI, Atsushi et al. (JP)
Aoki 篤 (JP)
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