METHOD FOR STARTING ULTRAPURE WATER PRODUCTION APPARATUS

WIPO Patent Application WO/2017/191829

A1

Provided is a method for starting an ultrapure water production apparatus (1) whereby the phenomenon of hunting for a fine particle count after the start of ultrapure water production can be suppressed and ultrapure water having an extremely low concentration of fine particles can be stably obtained. A method for starting an ultrapure water production apparatus (1), comprising cleaning an inside system of the ultrapure water production apparatus (1) prior to supplying of ultrapure water to a usage location in an ultrapure water production apparatus (1) for processing primary pure water to produce ultrapure water and supplying the ultrapure water to the usage location, wherein pure water containing hydrogen peroxide or a gas is caused to accumulate in or flow through a flow channel of the ultrapure water production apparatus (1), vibration is imparted from the outside to at least a portion of the flow channel, and fine particles adhering to an inside surface of the flow channel are removed.

WO/2019/236944	SYSTEMS, METHODS, AND KITS FOR TREATING ONE OR MORE CONTAINER SURFACES WITH A LIQUID
JP2023053740	PIPE CLEANING STRUCTURE
JP2003211109	DUCT CLEANING APPARATUS

AMAMIYA SHINICHIRO (JP)
SAKAI NAOYA (JP)
SUZUKI NORIHIKO (JP)
ABE TOSHIKAZU (JP)

PCT/JP2017/017139

November 09, 2017

May 01, 2017

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NOMURA MICRO SCIENCE KK (JP)

B08B9/032; B01D61/14; B08B3/08; B08B3/10; B08B3/12; B08B7/02; C02F1/44

JP2002151459A	2002-05-24
JP2014000548A	2014-01-09

SAKURA PATENT OFFICE, P.C. (JP)

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