Title:
METHOD OF SUPERCRITICAL TREATMENT AND APPARATUS FOR USE THEREIN
Document Type and Number:
WIPO Patent Application WO/2005/092487
Kind Code:
A1
Abstract:
[PROBLEMS] To provide a method of continuously feeding a supercritical solution fluid as a treating substance into a pressurized reaction system, and further to provide a supercritical fluid treating apparatus designed to stably perform treatment through continuous feeding of such a supercritical solution fluid into a pressurized reaction system. [MEANS FOR SOLVING PROBLEMS] There is provided a method comprising dissolving an organic material in a fluorinated compound in liquid form at ordinary temperature under atmospheric pressure to thereby obtain a solution, introducing the solution in a supercritical fluid, and treating a base material in supercritical conditions.
Inventors:
SHIMIZU TAKASHI (JP)
Application Number:
PCT/JP2005/005535
Publication Date:
October 06, 2005
Filing Date:
March 25, 2005
Export Citation:
Assignee:
NAT INST OF ADVANCED IND SCIEN (JP)
SHIMIZU TAKASHI (JP)
SHIMIZU TAKASHI (JP)
International Classes:
C01B32/50; B01J3/00; B01J3/04; H01L21/316; (IPC1-7): B01J3/00; B01J3/04; H01L21/316
Foreign References:
| JP2004025084A | 2004-01-29 | |||
| JP2002541320A | 2002-12-03 |
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