Title:
METHOD FOR SUPPLYING OZONE GAS AND SYSTEM FOR SUPPLYING OZONE GAS
Document Type and Number:
WIPO Patent Application WO/2017/047201
Kind Code:
A1
Abstract:
This method for supplying ozone gas includes: a step of supplying ozone gas from an ozone gas source (10) through a second flow path (85, 87, 102); and a step of switching to a state in which the ozone gas is supplied through a first flow path (85, 86, 91A, 92A, 96, 102) so that ozone gas in which the concentration of nitrogen oxide is reduced is supplied. The step of supplying the ozone gas through the second flow path (85, 87, 102) includes a step of introducing some of the ozone gas into a first container (20A) to suppress the ozone adsorption ability of a first adsorbent. In the step of supplying the ozone gas through the first flow path (85, 86, 91A, 92A, 96, 102) to the object to which the ozone gas is to be supplied to, the ozone gas passes through the first container (20A) which holds the first adsorbent in which the ozone adsorption ability has been suppressed.
Inventors:
MAKIHIRA NAOHISA (JP)
IZUMI KOICHI (JP)
FURUTANI MASAHIRO (JP)
IZUMI KOICHI (JP)
FURUTANI MASAHIRO (JP)
Application Number:
PCT/JP2016/069299
Publication Date:
March 23, 2017
Filing Date:
June 29, 2016
Export Citation:
Assignee:
IWATANI CORP (JP)
International Classes:
C01B13/11; B01D53/04
Domestic Patent References:
| WO2009069774A1 | 2009-06-04 |
Foreign References:
| JP2015010016A | 2015-01-19 | |||
| JP2000290004A | 2000-10-17 | |||
| JP2014065620A | 2014-04-17 |
Attorney, Agent or Firm:
KITANO, Shuhei et al. (JP)
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