Title:
METHOD AND SYSTEM FOR ADJUSTING PROCESS GAS FLOW OF VACUUM COATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/080512
Kind Code:
A1
Abstract:
A method for adjusting a process gas flow of a vacuum coating device, comprising: obtaining a set flow value of a process gas, and selecting a reference gas; determining a flow coefficient of the process gas with respect to the reference gas; calculating a corrected flow value of the process gas according to the set flow value and the flow coefficient of the process gas; and determining whether the corrected flow value of the process gas is greater than a measurement range maximum value of a gas flow meter for controlling the process gas flow, if the judging result is positive, giving an over-range alarm and using the measurement range maximum value of the gas flow meter as a flow control value of the process gas to perform a process procedure, and if the judging result is negative, using the corrected flow value as the flow control value of the process gas. Also provided is a system for adjusting the process gas flow of the vacuum coating device.
Inventors:
MA ZHENG (CN)
Application Number:
PCT/CN2018/091148
Publication Date:
May 02, 2019
Filing Date:
June 13, 2018
Export Citation:
Assignee:
BEIJING JUNTAIINNOVATION TECH CO LTD (CN)
International Classes:
C23C16/52; C23C16/455; C23C16/513; G05D7/06
Foreign References:
CN107779846A | 2018-03-09 | |||
JPS6421512A | 1989-01-24 | |||
CN102576231A | 2012-07-11 | |||
US5237523A | 1993-08-17 | |||
TW201439365A | 2014-10-16 |
Attorney, Agent or Firm:
AFD CHINA INTELLECTUAL PROPERTY LAW OFFICE (CN)
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