Title:
METHOD AND SYSTEM FOR CALIBRATING RADIATION THERMOMETER
Document Type and Number:
WIPO Patent Application WO/2020/241850
Kind Code:
A1
Abstract:
The present invention relates to a method and a system for automatically calibrating a radiation thermometer disposed on a polishing device. A method according to the present invention comprises: placing a heating device (61) having a measurement object (68) attached thereto under a radiation thermometer (48); heating the measurement object (68) to a plurality of target temperatures (Ta) using a control unit (40) of a polishing device connected to the heating device (61); measuring the temperature of the measurement object (68) at each of the target temperatures (Ta) using the radiation thermometer (48); calculating temperature deviation amounts, which are differences between each of the target temperatures (Ta) and a corresponding value of the temperature outputted by the radiation thermometer (48); and calibrating the radiation thermometer (48) so that all of the temperature deviation amounts are within a predetermined reference range.
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Inventors:
UOZUMI SHUJI (JP)
MOTOSHIMA YASUYUKI (JP)
MOTOSHIMA YASUYUKI (JP)
Application Number:
PCT/JP2020/021421
Publication Date:
December 03, 2020
Filing Date:
May 29, 2020
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
G01J5/00; B24B37/015; H01L21/304
Foreign References:
| JPH04303931A | 1992-10-27 | |||
| JP2004085685A | 2004-03-18 | |||
| JP2002301660A | 2002-10-15 | |||
| JP2005311246A | 2005-11-04 | |||
| JP2000337967A | 2000-12-08 | |||
| JPH05296843A | 1993-11-12 | |||
| JPH0729427U | 1995-06-02 | |||
| JP2000515638A | 2000-11-21 | |||
| US5127742A | 1992-07-07 |
Attorney, Agent or Firm:
HIROSAWA, Tetsuya et al. (JP)
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