Title:
METHOD AND SYSTEM FOR CONTROLLING PLASMA PROCESS BY USING SMART SENSOR
Document Type and Number:
WIPO Patent Application WO/2022/039311
Kind Code:
A1
Abstract:
The present invention relates to a method and a system for controlling a plasma process by using a smart sensor, the method comprising the steps of: correcting, by the smart sensor, spectral data by classifying the spectral data included in sensing data generated at a first time point of a plasma process for each specific gas; predicting plasma process information for a second time point after the first time point on the basis of the spectral data corrected by the smart sensor; and controlling a process factor related to the plasma process according to whether or not the plasma process information predicted by the smart sensor is normal. Other embodiments are also possible.
Inventors:
SONG JUNG HO (KR)
SONG MI YOUNG (KR)
KIM DAE CHUL (KR)
KIM JONG SIK (KR)
KIM YONG HYUN (KR)
YOON JUNG SIK (KR)
KIM YOUNG WOO (KR)
HAN DUK SUN (KR)
CHO KI HWAN (KR)
SONG MI YOUNG (KR)
KIM DAE CHUL (KR)
KIM JONG SIK (KR)
KIM YONG HYUN (KR)
YOON JUNG SIK (KR)
KIM YOUNG WOO (KR)
HAN DUK SUN (KR)
CHO KI HWAN (KR)
Application Number:
PCT/KR2020/011267
Publication Date:
February 24, 2022
Filing Date:
August 24, 2020
Export Citation:
Assignee:
KOREA INST OF FUSION ENERGY (KR)
International Classes:
H05H1/00; H01J37/32
Foreign References:
| KR20180114435A | 2018-10-18 | |||
| JP2006317371A | 2006-11-24 | |||
| JPH0637021A | 1994-02-10 | |||
| JP2014170668A | 2014-09-18 | |||
| US20150004721A1 | 2015-01-01 |
Attorney, Agent or Firm:
ERUUM & LEEON INTELLECTUAL PROPERTY LAW FIRM (KR)
Download PDF: