Title:
METHOD AND SYSTEM FOR ESTABLISHING THE CLEANLINESS OF A DEVICE
Document Type and Number:
WIPO Patent Application WO2004088278
Kind Code:
A3
Abstract:
A system and method for establishing the cleanliness of a device by performing a test is described. The system includes an ion mobility spectrometer to measure target signal strengths, and to measure n2>=1 test signal strengths of a device sample. The system also includes a statistics module to obtain a value of a statistical confidence-level parameter that is associated with a particular confidence level, and a pass range module to obtain a pass range of signal strengths from the value of the statistical confidence-level parameter and the n1 target signal strengths. The system also includes an averaging module to obtain an average test signal strength from the n2 test signal strengths, and a results module to determine that the device passes the test, indicating that the device is significantly clean to within the particular confidence level, if the average test signal strength lies in the pass range.
Inventors:
DEBONO RENO FRANCIS (US)
CARROLL JOHN J (US)
SANDOR ROBERT BRUCE (US)
CARROLL JOHN J (US)
SANDOR ROBERT BRUCE (US)
Application Number:
PCT/US2004/009325
Publication Date:
December 16, 2004
Filing Date:
March 26, 2004
Export Citation:
Assignee:
SMITHS DETECTION (US)
DEBONO RENO FRANCIS (US)
CARROLL JOHN J (US)
SANDOR ROBERT BRUCE (US)
DEBONO RENO FRANCIS (US)
CARROLL JOHN J (US)
SANDOR ROBERT BRUCE (US)
International Classes:
G01N27/64; H01J49/40; (IPC1-7): H01J49/40
Foreign References:
| US6627878B1 | 2003-09-30 | |||
| US4806765A | 1989-02-21 | |||
| US5300773A | 1994-04-05 | |||
| US4943929A | 1990-07-24 | |||
| US4490678A | 1984-12-25 |
Other References:
See also references of EP 1609168A4
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