Title:
METHOD AND SYSTEM FOR HYBRID RETICLE INSPECTION
Document Type and Number:
WIPO Patent Application WO/2012/148848
Kind Code:
A3
Abstract:
A semiconductor inspection apparatus performs a hybrid inspection process including cell-to-cell inspection, die-to-die inspection and die-to-golden or die-to- database inspection. The apparatus creates a golden image of a reticle complimentary to portions of the reticle that can be inspected by cell-to-cell inspection or die-to-die inspection. Alternatively, the apparatus creates a reduced database complimentary to portions of the reticle that can be inspected by cell-to- cell inspection or die-to-die inspection.
Inventors:
HESS CARL (US)
MILLER JOHN D (US)
XUE SHAN (US)
LOPRESTI PATRICK (US)
MILLER JOHN D (US)
XUE SHAN (US)
LOPRESTI PATRICK (US)
Application Number:
PCT/US2012/034665
Publication Date:
May 01, 2014
Filing Date:
April 23, 2012
Export Citation:
Assignee:
KLA TENCOR CORP (US)
HESS CARL (US)
MILLER JOHN D (US)
XUE SHAN (US)
LOPRESTI PATRICK (US)
HESS CARL (US)
MILLER JOHN D (US)
XUE SHAN (US)
LOPRESTI PATRICK (US)
International Classes:
G01R31/02
Foreign References:
| US20090080759A1 | 2009-03-26 | |||
| US20060234139A1 | 2006-10-19 |
Attorney, Agent or Firm:
THIELEN, Shane, R. (14301 FNB Parkway Suite 22, Omaha NE, US)
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